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The High-Q™ Integrated Passive Device (IPD) process technology from onsemi offers a copper on high resistivity silicon platform ideal for the production of passive devices such as baluns, filters, couplers, and diplexers that are used in portable, wireless and RF applications. IPD provides a cost effective solution for RF system in package. A foundry shuttle service is available for engineering prototypes. IPD technology supports fabrication of copper inductors, precision capacitors, and precision resistors in a world-class 200 mm wafer manufacturing facility. Design services are offered for custom applications. A full feature design kit is available to customers for layout, simulation, and verification.


Parameters

Family

Value

Si HRS Substrate

1.5 kΩ∙cm

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MIM Capacitance density

0.62 F/µm²

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Resistor Sheet Resistance

9 Ω/square

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Inductor Sheet Resistance

3.5 mΩ/square

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Base Si Oxide Thickness

5.6 µm

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MIM Operating Voltage

20 V

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M1 Al Metal Thickness

2 µm

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MN Cu Metal Thickness

5 µm

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MN2 Cu Metal Thickness

5 µm

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Bond Pad

Wirebond, Flip-Chip

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Features

High-Q™ copper inductor
MIM capacitor
TiN metal resistor
Three metal routing layers (1 Al, 2 Cu)
200 mm silicon wafer diameter
High resistivity silicon substrate
Planar dual damascene copper process
Superior process control
Full feature design kit
Design services
Foundry shuttle service
Smaller area than discrete solutions
Thinner than LTCC
Lower cost than GaAs
Better performance than other silicon solutions

Custom CCD Image Sensor Capabilities

(All Values Typical at 25°C)

Inductors

Parameter

Value

Copper Thickness

5, 10 µm

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Min Width

5 µm

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Max Width

40 µm

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Min Space

3 µm

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Min Inner Diameter

50 µm

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Recommended Range

1 - 50 nH

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Peak Q

25 - 45 nH

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Capacitors

Parameter

Value

Min Width

15.75 µm

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Max Width

450 µm

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Max Area

45 000 µm²

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Recommended Range

1 - 100 pF

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Resistors

Parameter

Value

Min Width

2 µm

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Min Length

9 µm

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CAD Tool Compatibility

Shecmatic Capture + Place and Route: Cadence Viruoso, Agilent ADS

Simulation: Ansoft HFSS, Agilent ADS

Physical Verification: Cadence Assura, Mentor Calibre

Software

IPD1/2

PDKs (Pcells & Models): Cadence Virtuoso OA, Keysight ADS, NI AWR Environment V13
Templates: ANSYS HFSS, Integrand EMX, Sonnet

IPD0

Excel Calculator Tool